DocumentCode :
2471202
Title :
New Air Gap Type Piezoelectric Composite Thin Film Resonators
Author :
Yamanouchi, K. ; Oba, M.
fYear :
1987
fDate :
14-16 Oct. 1987
Firstpage :
415
Lastpage :
418
Keywords :
Electrodes; Etching; Piezoelectric films; Residual stresses; Semiconductor films; Semiconductor thin films; Thin film circuits; Thin film devices; Transistors; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
Type :
conf
DOI :
10.1109/ULTSYM.1987.198993
Filename :
1535933
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2471202
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