Title :
Evolutionary design optimization of MEMS: A brief review
Author :
Zhu, Haoshen ; Wang, Pan ; Fan, Zhun
Author_Institution :
Wuhan Univ. of Technol., Wuhan, China
Abstract :
The limitations of the conventional automated design tools for Micro-Electro-Mechanical-Systems (MEMS) design optimization (DO) are discussed in this paper. In order to overcome these difficulties, a recent trend in DO of MEMS is inspired by the natural evolution mechanism. Various techniques, especially the evolutionary computation (EC), have been adopted for the DO of MEMS. This paper presents a review of the achievements in this infant research area which utilizes EC methods for the DO of MEMS and points out the challenges that it is facing.
Keywords :
evolutionary computation; micromechanical devices; optimisation; MEMS design; automated design tools; evolutionary computation; evolutionary design optimization; micro-electro-mechanical-systems design optimization; natural evolution mechanism; Algorithm design and analysis; Design automation; Design optimization; Evolutionary computation; Microelectromechanical devices; Micromechanical devices; NASA; Optimization methods; Space technology; Stochastic processes;
Conference_Titel :
Industrial Technology (ICIT), 2010 IEEE International Conference on
Conference_Location :
Vi a del Mar
Print_ISBN :
978-1-4244-5695-6
Electronic_ISBN :
978-1-4244-5696-3
DOI :
10.1109/ICIT.2010.5472635
