Title :
Control-oriented modelling of an experimental Ar-O2 plasma process
Author :
Iordanov, Petar ; Ringwood, John
Author_Institution :
Dept. of Electron. & Comput. Eng., Univ. of Limerick, Limerick, Ireland
Abstract :
Development of a control-oriented model of an experimental plasma reactor is presented in this paper. The model structure is suitably partitioned in order to facilitate any subsequent control design. In the model, the linear dynamical part is conveniently separated from a static nonlinearity, which in turn allows identification to be performed for both parts independently. Validation results indicate that the model gives a reasonable representation of the studied plasma process.
Keywords :
Langmuir probes; antennas in plasma; argon; fusion reactor design; oxygen; plasma flow; plasma nonlinear processes; Ar-O2; Langmiur probe; argon flow; control-oriented model; experimental plasma reactor; model structure; optical diagnostics; oxygen flow; plasma process; static nonlinearity; water cooled copper antenna; Control design; Electric variables control; Etching; Inductors; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing; Power system modeling; Radio frequency;
Conference_Titel :
Industrial Technology (ICIT), 2010 IEEE International Conference on
Conference_Location :
Vi a del Mar
Print_ISBN :
978-1-4244-5695-6
Electronic_ISBN :
978-1-4244-5696-3
DOI :
10.1109/ICIT.2010.5472657
