Title :
Microscopic Fluctuations in Air Bearings Measured by Novel Piezoelectric Sensors
Author :
Yeack-Scranton, C.E.
Keywords :
Acceleration; Capacitance; Fluctuations; Frequency; Magnetic sensors; Microscopy; Optical surface waves; Piezoelectric transducers; Resonance; Sensor phenomena and characterization;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.199015