DocumentCode
2471707
Title
Microscopic Fluctuations in Air Bearings Measured by Novel Piezoelectric Sensors
Author
Yeack-Scranton, C.E.
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
535
Lastpage
538
Keywords
Acceleration; Capacitance; Fluctuations; Frequency; Magnetic sensors; Microscopy; Optical surface waves; Piezoelectric transducers; Resonance; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.199015
Filename
1535955
Link To Document