Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)

fYear

2000

fDate

11-13 July 2000

Abstract

Presents the front cover from the conference proceedings.

Keywords

lithography; nanotechnology; lithography; microprocessing; microsystem technology; nanotechnology;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2000 International

Conference_Location

Tokyo, Japan

Print_ISBN

4-89114-004-6

Type

conf

DOI

10.1109/IMNC.2000.872592

Filename

872592

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