Title :
A Monolithic SAW Physical-Electronic System for Sensors
Author :
Vellekoop, M.J. ; Nieuwkoop, E. ; Haartsan, J.C. ; Venema, A.
Keywords :
Chemical sensors; Delay lines; Electronic circuits; Frequency; Oscillators; Sensor systems; Silicon; Surface acoustic waves; Temperature sensors; Transducers;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.199037
