Biochemical IC using micro stereolithography-towards artificial cellular device

New types of micro fluidic device named "Biochemical IC Family" were developed and basic performances of each chip as well as overall ability of combined chips were verified experimentally. The original concept of the biochemical IC has been proposed by Ikuta. Each chemical IC chip in a disk shape (or cell shape) contains different functional devices such as multiple micro pumps, valves, micro concentrators and micro reactors etc. This chip is constructed by two kinds of materials. Upper part of the chip including micro fluid system is made of UV curable polymer because 3D micro fabrication is employed to make it. Bottom part of the chip is made of silicon circuit for electrical interaction among the chips. The biochemical IC introduces the strong point of today\´s IC/LSI family such as C-MOS/TTL chip-set.. Therefore, various kind of micro chemical apparatus can be assembled by the user.