DocumentCode
2472346
Title
CMOS-compatible waveguiding platform on bulk silicon
Author
Sherwood-Droz, Nicolás ; Gondarenko, Alexander ; Lipson, Michal
Author_Institution
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
fYear
2009
fDate
9-11 Sept. 2009
Firstpage
143
Lastpage
145
Abstract
We demonstrate a bulk silicon alternative to the conventional silicon-on-insulator photonics platform. We show waveguide losses of 10 dB/cm with a technique that can be implemented on the front-end of a typical CMOS fabrication line.
Keywords
CMOS integrated circuits; elemental semiconductors; integrated optics; optical fabrication; optical waveguides; silicon; CMOS fabrication line; CMOS-compatible waveguiding platform; Si; bulk silicon; high index-contrast photonics; integrated waveguides; optical waveguide fabrication; photonics integration; waveguide losses; Bonding; III-V semiconductor materials; Integrated optics; Optical buffering; Optical device fabrication; Optical losses; Optical modulation; Optical waveguides; Photonics; Silicon on insulator technology; CMOS integrated circuits; integrated optics; silicon on insulator technology; silicon photonics;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on
Conference_Location
San Francisco, CA
ISSN
1949-2081
Print_ISBN
978-1-4244-4402-1
Electronic_ISBN
1949-2081
Type
conf
DOI
10.1109/GROUP4.2009.5338337
Filename
5338337
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