7F-1 Design of Band-Stop Filters Using PZT Layer On Silicon Substrate Phononic Crystals

Author

Hladky-Hennion, A.C. ; Vasseur, Jerome ; Dubus, B. ; Duval, Fabrice ; Morvan, B.

Author_Institution

Inst. d´Electron. de Microelectronique et de Nanotechnologie, Lille

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

620

Lastpage

623

Abstract

The realization of a stop-band filter constituted by a periodically patterned PZT layer, polarized along thickness, on silicon substrate and interdigitated electrodes (IDE) for emission/reception of guided elastic waves, is investigated. The filter characteristics are theoretically evaluated by using finite element simulations: dispersion curves of patterned PZT layer are computed for a given pattern geometry to obtain the absolute band gap. Complete structure is then modelled, with appropriate IDE to propagate a guided mode in the piezoelectric layer. Finally, filtering capability of the structure is evaluated.

Keywords

band-stop filters; elastic waves; energy gap; finite element analysis; lead compounds; phononic crystals; piezoelectric materials; silicon; PZT layer; PZT-Si; band-stop filters; dispersion curve; filtering application; finite element simulation; guided elastic waves; interdigitated electrodes; pattern geometry; phononic crystals; piezoelectric layer; silicon substrate; Computational geometry; Computational modeling; Crystals; Electrodes; Filters; Finite element methods; Photonic band gap; Polarization; Silicon; Solid modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2007. IEEE

Conference_Location

New York, NY

ISSN

1051-0117

Print_ISBN

978-1-4244-1384-3

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2007.161

Filename

4409734