Title :
Prism coupling measurements of AlxGa1-xAs native oxides
Author :
Luo, Y. ; Kou, L. ; Wu, H. ; Hall, D.C. ; Blum, O. ; Hou, H.
Author_Institution :
Dept. of Electr. Eng., Notre Dame Univ., IN, USA
Abstract :
We have presented various results from prism coupling measurements on AlGaAs native oxides. We have observed a strong index variation with Al composition which is suitable for the formation of all-oxide planar waveguides. An unexpected decrease in the oxidation activation energy is observed
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; optical planar waveguides; optical prisms; optical testing; Al composition; AlxGa1-xAs native oxides; AlGaAs; all-oxide planar waveguides; oxidation activation energy; prism coupling measurements; strong index variation; Artificial intelligence; Chemical analysis; Electric variables measurement; Laboratories; Optical films; Oxidation; Phase change materials; Probes; Semiconductor waveguides; Temperature sensors;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-4947-4
DOI :
10.1109/LEOS.1998.739548
