Title :
Characteristics of piezoresistive mass flow sensor fabricated by porous silicon micromachining
Author :
Dong-Kwon Kim ; Sung-Gyu Kang ; Jeong-Yong Park ; Jun-Hwan Sim ; Jang-Kyoo Shin ; Pyung Choi ; Jong-Hyun Lee
Author_Institution :
Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Taegu, South Korea
Abstract :
Piezoresistive flow sensors with four different types of microcantilever structures were fabricated using [100], n/n+/n three-layer silicon wafer and their characteristics were investigated.
Keywords :
elemental semiconductors; flow measurement; micromachining; microsensors; piezoresistive devices; porous materials; silicon; Si; fabrication; microcantilever; micromachining; piezoresistive mass flow sensor; porous silicon wafer; Bridge circuits; Geometry; Micromachining; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon; Stress; Thermal sensors; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872632
