• DocumentCode
    2472796
  • Title

    Fabrication of new electrostatic linear actuator

  • Author

    Matsunaga, T. ; Kondoh, K. ; Kumagae, M. ; Kawara, H. ; Yasuda, M. ; Murata, K.

  • Author_Institution
    Dept. of Phys. & Electron., Osaka Prefecture Univ., Japan
  • fYear
    2000
  • fDate
    11-13 July 2000
  • Firstpage
    84
  • Lastpage
    85
  • Abstract
    It is hard to construct an actuator which has a large stroke in one direction. In this paper, we propose a new electrostatic linear actuator which has 500 /spl mu/m stroke. A novel process is developed for fabricating the actuator at low temperatures up to 110/spl deg/C through the entire process. We also simulate the electrostatic forces in this actuator.
  • Keywords
    electrostatic actuators; electrostatic linear actuator; fabrication; Electrodes; Electrostatic actuators; Fabrication; Hydraulic actuators; Resists; Substrates; Switches; Teeth; Temperature; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2000 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-004-6
  • Type

    conf

  • DOI
    10.1109/IMNC.2000.872634
  • Filename
    872634
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2472796