DocumentCode :
2472922
Title :
The Influence of Thin Film Microstructure on Surface Acoustic Wave Velocity
Author :
Crean, G.M. ; Somekh, M.G. ; Golanski, A. ; Oberlin, J.C.
fYear :
1987
fDate :
14-16 Oct. 1987
Firstpage :
843
Lastpage :
848
Keywords :
Acoustic waves; Annealing; Microstructure; Semiconductor thin films; Silicides; Silicon; Sputtering; Surface acoustic waves; Surface treatment; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
Type :
conf
DOI :
10.1109/ULTSYM.1987.199077
Filename :
1536017
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2472922
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