DocumentCode
2472922
Title
The Influence of Thin Film Microstructure on Surface Acoustic Wave Velocity
Author
Crean, G.M. ; Somekh, M.G. ; Golanski, A. ; Oberlin, J.C.
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
843
Lastpage
848
Keywords
Acoustic waves; Annealing; Microstructure; Semiconductor thin films; Silicides; Silicon; Sputtering; Surface acoustic waves; Surface treatment; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.199077
Filename
1536017
Link To Document