DocumentCode
2473209
Title
Design and fabrication of magnetically driven micromirror with large angular deflection
Author
Chang Hyeon Ji ; Yong-Kweon Kim
Author_Institution
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
fYear
2000
fDate
11-13 July 2000
Firstpage
132
Lastpage
133
Abstract
In this research we have designed and fabricated electromagnetically driven micromirror by combination of surface and bulk micromachining processes. Individual mirror plate and springs occupy relatively small area of 300/spl times/300 /spl mu/m/sup 2/. To obtain flat mirror surface, bulk silicon of thickness ranging from 10 to 20 /spl mu/m is used as a mirror plate. For the mirror plate to have substantial amount of angular deflection, aluminum is used as a spring material and crab-leg shaped spring is used.
Keywords
micro-optics; microactuators; micromachining; mirrors; optical fabrication; Si; aluminum spring; angular deflection; bulk micromachining; magnetic actuation; micromirror; surface micromachining; Etching; Fabrication; Magnetic materials; Micromirrors; Mirrors; Nickel; Rough surfaces; Silicon; Springs; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-004-6
Type
conf
DOI
10.1109/IMNC.2000.872657
Filename
872657
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