Title :
Highly integrated cantilever with light emitting diode, channel waveguide, aperture, and photodiode for scanning near-field optical microscope
Author :
Sasaki, M. ; Tanaka, K. ; Hane, K.
Author_Institution :
Dept. of Mech. & Precision Eng., Tohoku Univ., Sendai, Japan
Abstract :
In this study, a highly integrated cantilever for a scanning near-field optical microscope (SNOM) is described. All components necessary for the SNOM system (light emitting diode (LED) for light source, channel waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.
Keywords :
light emitting diodes; near-field scanning optical microscopy; optical waveguide components; photodiodes; aperture tip; channel waveguide; integrated cantilever; light emitting diode; light source; photodiode; scanning near-field optical microscope; Apertures; Atomic force microscopy; Integrated optics; Light emitting diodes; Optical films; Optical microscopy; Optical surface waves; Optical waveguides; Photodiodes; Probes;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-004-6
DOI :
10.1109/IMNC.2000.872666
