DocumentCode
2473386
Title
Highly integrated cantilever with light emitting diode, channel waveguide, aperture, and photodiode for scanning near-field optical microscope
Author
Sasaki, M. ; Tanaka, K. ; Hane, K.
Author_Institution
Dept. of Mech. & Precision Eng., Tohoku Univ., Sendai, Japan
fYear
2000
fDate
11-13 July 2000
Firstpage
146
Lastpage
147
Abstract
In this study, a highly integrated cantilever for a scanning near-field optical microscope (SNOM) is described. All components necessary for the SNOM system (light emitting diode (LED) for light source, channel waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.
Keywords
light emitting diodes; near-field scanning optical microscopy; optical waveguide components; photodiodes; aperture tip; channel waveguide; integrated cantilever; light emitting diode; light source; photodiode; scanning near-field optical microscope; Apertures; Atomic force microscopy; Integrated optics; Light emitting diodes; Optical films; Optical microscopy; Optical surface waves; Optical waveguides; Photodiodes; Probes;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-004-6
Type
conf
DOI
10.1109/IMNC.2000.872666
Filename
872666
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