DocumentCode
2473407
Title
A surface-bulk micromachined electromagnetic gyroscope operating at atmospheric pressure
Author
Kim, Seong-Hyok ; Kim, Yong-Kweon ; Song, Jin-Woo ; Lee, Jang-Gyu
Author_Institution
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
fYear
2000
fDate
11-13 July 2000
Firstpage
148
Lastpage
149
Abstract
This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope. The fabrication process is based on a surface-bulk combined micromachining, and the fabricated gyroscope can be operated at atmospheric pressure with good output characteristics.
Keywords
electromagnetic devices; gyroscopes; micromachining; microsensors; MEMS technology; atmospheric pressure; bulk micromachining; electromagnetic sensing; electrostatic driving; fabrication; planar vibratory gyroscope; surface micromachining; Actuators; Anisotropic magnetoresistance; Coils; Etching; Fabrication; Gyroscopes; Micromachining; Silicon; Springs; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2000 International
Conference_Location
Tokyo, Japan
Print_ISBN
4-89114-004-6
Type
conf
DOI
10.1109/IMNC.2000.872668
Filename
872668
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