Title :
11E-4 Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators
Author :
Jansman, A.B.M. ; Strijbos, R.C. ; Lobeek, J.W. ; Vanhelmont, F.W.M. ; Ruigrok, J.J.M. ; Pensala, T. ; Ylilammi, M.
Author_Institution :
NXP Semicond. Res. Eindhoven, Eindhoven
Abstract :
For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.
Keywords :
acoustic dispersion; acoustic resonators; bulk acoustic wave devices; membranes; BAW resonators; bulk acoustic wave resonators; dispersion characteristics; vibrating membrane model; Acoustic devices; Biomembranes; Brain modeling; Dispersion; Electric variables measurement; Frequency; Optical interferometry; Optical resonators; Partial differential equations; Resonance;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.264
