DocumentCode
2475064
Title
W-band measurements of 100 /spl mu/m height micro-machined air-filled rectangular waveguides
Author
Collins, C.E. ; Digby, J.W. ; Pollard, R.D. ; Miles, R.E. ; Parkhurst, G.M. ; Chamberlain, J.M. ; Steenson, D.P. ; Cronin, N.J. ; Karatzas, L.S. ; Bowen, J.W.
Author_Institution
Dept. of Electron. & Electr. Eng., Leeds Univ., UK
Volume
3
fYear
1997
fDate
8-13 June 1997
Firstpage
1439
Abstract
The first S-parameter measurements of micro-machined 100 /spl mu/m high air-filled rectangular waveguides are reported, which have been performed at W-band using a specially designed test fixture connected to a standard vector network analyser. The results obtained show low loss and demonstrate propagation in TE/sub 10/ mode.
Keywords
S-parameters; micromachining; millimetre wave measurement; rectangular waveguides; 100 micron; S-parameter; TE/sub 10/ mode propagation; W-band measurement; loss; micro-machined air-filled rectangular waveguide; test fixture; vector network analyser; Coplanar waveguides; Cutoff frequency; Fixtures; Integrated circuit technology; Performance evaluation; Rectangular waveguides; Resists; Scattering parameters; Semiconductor waveguides; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location
Denver, CO, USA
ISSN
0149-645X
Print_ISBN
0-7803-3814-6
Type
conf
DOI
10.1109/MWSYM.1997.596600
Filename
596600
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