High field conduction in poly-p-xylylene thin film

Author

Mizutani, T. ; Mori, T. ; Takai, Y. ; Ieda, U.

Author_Institution

Dept. of Electr. Eng., Nagoya Univ., Japan

fYear

1988

fDate

5-8 June 1988

Firstpage

154

Lastpage

157

Abstract

Poly-p-xylylene (PPX) films prepared by thermal chemical vapor deposition showed a negative temperature dependence of high-field current, dJ/dT<0, in the low-temperature region. The high-field current was accompanied by electroluminescence (EL). These results are explained in terms of collision ionization. In poly-2-chloro-p-xylyene (PCPX) films, which had a chlorine atom in a monomer unit, high-field current and EL were suppressed. Similar phenomena were observed on PPX films treated by an RF plasma. These films showed a higher breakdown strength than PPX films. It is concluded that chlorine atoms or defects introduced by the plasma treatment act as scattering centers and suppress the collision ionizations.<>

Keywords

CVD coatings; electric breakdown of solids; electroluminescence; high field effects; impact ionisation; luminescence of organic solids; polymer films; RF plasma; breakdown strength; collision ionization; electroluminescence; high field conduction; high-field current; negative temperature dependence; poly-2-chloro-p-xylyene; poly-p-xylylene thin film; scattering centers; thermal chemical vapor deposition; Atomic layer deposition; Chemical vapor deposition; Electric breakdown; Electroluminescence; Ionization; Plasmas; Radio frequency; Scattering; Temperature dependence; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Insulation, 1988., Conference Record of the 1988 IEEE International Symposium on

Conference_Location

Cambridge, MA, USA

ISSN

1089-084X

Type

conf

DOI

10.1109/ELINSL.1988.13892

Filename

13892