Title :
Comb- Actuated resonant torsional scanner for microdisplays
Author :
Arslan, Aslihan ; Holmstrom, Sven ; Gokce, S. Kutal ; Urey, Hakan
Author_Institution :
Opt. Microsyst. Lab., Koc Univ., Istanbul, Turkey
Abstract :
A comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64deg TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
Keywords :
actuators; micro-optomechanical devices; optical scanners; 1D torsional MEMS scanner; comb actuator; frequency 22.1 kHz; high resolution projection display systems; mechanical coupling; peak-to-peak excitation voltages; resonant torsional scanner; total optical scan angle; Damping; Displays; Fingers; Microdisplays; Micromechanical devices; Mirrors; Resonance; Resonant frequency; Torque; Voltage; Torsional scanner; comb drive; display; mechanical coupling;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338540
