DocumentCode
2475509
Title
Theory for image-based identification of SPM dynamics
Author
Clayton, G.M. ; Devasia, S.
Author_Institution
Dept. of Mech. Eng., Villanova Univ., Villanova, PA, USA
fYear
2009
fDate
10-12 June 2009
Firstpage
1670
Lastpage
1675
Abstract
Rather than use external sensors, images of standard calibration samples can be used to model and correct positioning errors, caused by dynamics effects, in scanning probe microscopes (SPMs). The main contribution of the current article is the development of conditions, on the calibration sample and the scan trajectory, that allow for the image-based identification of SPM-nanopositioner dynamics.
Keywords
identification technology; scanning probe microscopy; SPM dynamics; calibration samples; image-based identification; nanopositioner dynamics; scan trajectory; scanning probe microscopes; Calibration; Error correction; Image reconstruction; Image sensors; Manipulator dynamics; Mechanical sensors; Nanopositioning; Position measurement; Scanning probe microscopy; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2009. ACC '09.
Conference_Location
St. Louis, MO
ISSN
0743-1619
Print_ISBN
978-1-4244-4523-3
Electronic_ISBN
0743-1619
Type
conf
DOI
10.1109/ACC.2009.5160576
Filename
5160576
Link To Document