Title :
Theory for image-based identification of SPM dynamics
Author :
Clayton, G.M. ; Devasia, S.
Author_Institution :
Dept. of Mech. Eng., Villanova Univ., Villanova, PA, USA
Abstract :
Rather than use external sensors, images of standard calibration samples can be used to model and correct positioning errors, caused by dynamics effects, in scanning probe microscopes (SPMs). The main contribution of the current article is the development of conditions, on the calibration sample and the scan trajectory, that allow for the image-based identification of SPM-nanopositioner dynamics.
Keywords :
identification technology; scanning probe microscopy; SPM dynamics; calibration samples; image-based identification; nanopositioner dynamics; scan trajectory; scanning probe microscopes; Calibration; Error correction; Image reconstruction; Image sensors; Manipulator dynamics; Mechanical sensors; Nanopositioning; Position measurement; Scanning probe microscopy; Tunneling;
Conference_Titel :
American Control Conference, 2009. ACC '09.
Conference_Location :
St. Louis, MO
Print_ISBN :
978-1-4244-4523-3
Electronic_ISBN :
0743-1619
DOI :
10.1109/ACC.2009.5160576
