Title :
Variable-focus SU-8 membrane mirror with enhanced stroke using feedback control
Author :
Lukes, Sarah ; Lutzenberger, B. Jeffrey ; Dunbar, Erwin ; Shaw, Steven R. ; Dickensheets, David L.
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT, USA
Abstract :
We describe enhanced deflection of an electrostatic deformable mirror made from SU-8 epoxy. Using closed-loop feedback control, stable static deflection of a circular mirror to 75% of the air-gap has been achieved.
Keywords :
adaptive optics; closed loop systems; electrostatics; feedback; membranes; mirrors; optical control; optical focusing; optical polymers; air-gap; circular mirror; closed-loop feedback control; electrostatic deformable mirror; enhanced stroke; stable static deflection; variable-focus SU-8 epoxy membrane mirror; Aluminum; Biomembranes; Electrodes; Feedback control; Mirrors; Optical buffering; Optical feedback; Optical sensors; Silicon; Wafer bonding;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338541
