Title :
Tunable MEMS-based optical linear (1D) diffusers for dynamic laser beam shaping and homogenizing
Author :
Masson, J. ; Bich, A. ; Noell, W. ; Voelkel, R. ; Weible, K.J. ; de Rooij, N.F.
Author_Institution :
Sensors, Actua.tors & Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
Abstract :
We present a dynamic laser beam shaper based on MEMS technology. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension and to average speckles over a certain time frame.
Keywords :
deformation; heat treatment; laser beams; laser tuning; light scattering; membranes; micro-optomechanical devices; optical pulse shaping; silicon; speckle; Si; dynamic laser beam shaping; homogenizing; laser beam diffuser; laser speckle; linearly deformable silicon micromembrane; optical linear diffuser; tunable MEMS-based diffuser; Actuators; Adaptive optics; Biomembranes; Laser beam cutting; Laser beams; Laser tuning; Micromirrors; Optical beams; Silicon; Tunable circuits and devices; Dynamic linear diffuser; Flat top; MEMS; Membrane;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338551
