DocumentCode
2475674
Title
Tunable MEMS-based optical linear (1D) diffusers for dynamic laser beam shaping and homogenizing
Author
Masson, J. ; Bich, A. ; Noell, W. ; Voelkel, R. ; Weible, K.J. ; de Rooij, N.F.
Author_Institution
Sensors, Actua.tors & Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
fYear
2009
fDate
17-20 Aug. 2009
Firstpage
129
Lastpage
130
Abstract
We present a dynamic laser beam shaper based on MEMS technology. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension and to average speckles over a certain time frame.
Keywords
deformation; heat treatment; laser beams; laser tuning; light scattering; membranes; micro-optomechanical devices; optical pulse shaping; silicon; speckle; Si; dynamic laser beam shaping; homogenizing; laser beam diffuser; laser speckle; linearly deformable silicon micromembrane; optical linear diffuser; tunable MEMS-based diffuser; Actuators; Adaptive optics; Biomembranes; Laser beam cutting; Laser beams; Laser tuning; Micromirrors; Optical beams; Silicon; Tunable circuits and devices; Dynamic linear diffuser; Flat top; MEMS; Membrane;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location
Clearwater, FL
Print_ISBN
978-1-4244-2382-8
Electronic_ISBN
978-1-4244-2382-8
Type
conf
DOI
10.1109/OMEMS.2009.5338551
Filename
5338551
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