Title :
Optical characterization technique for MEMS comb-drive resonators
Author :
Sabry, Y. ; Medhat, M. ; Saadany, B. ; Safwat, A. ; Khalil, D.
Author_Institution :
Fac. of Eng., Ain-Shams Univ., Cairo, Egypt
Abstract :
A novel optical technique is proposed for the characterization of MEMS resonators. The proposed technique is based on measuring the response of the resonator (resonance frequency and quality factor) optically, which eliminates the electrical parasitic effects. The proposed technique was applied to a comb-drive resonator and the obtained results show good agreement with the standard electrical technique with 2-5% deviation in the resonance frequency and 2-10% in the quality factor.
Keywords :
Q-factor; mechanical variables measurement; micro-optomechanical devices; micromechanical resonators; micromirrors; MEMS resonators; comb-drive resonator; electrical parasitic effects; mirror; optical characterization technique; quality factor; resonance frequency; Actuators; Electric variables measurement; Frequency measurement; Micromechanical devices; Optical interferometry; Optical resonators; Optical sensors; Q factor; Resonance; Resonant frequency; Comb-Drive Resonator; Fabry-Pérot Interferometer; MEMS Resonator; Optical Characterization; Quality Factor; Resonance Frequency;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338564
