DocumentCode
2475855
Title
Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics
Author
Mitsuishi, I. ; Ezoe, Y. ; Takagi, U. ; Hayashi, T. ; Sato, T. ; Morishita, K. ; Nakajima, K. ; Yamasaki, N.Y. ; Mitsuda, K.
Author_Institution
Inst. of Space & Astronaut. Sci. (ISAS), Japan Aerosp. Exploration Agency (JAXA), Japan
fYear
2009
fDate
17-20 Aug. 2009
Firstpage
123
Lastpage
124
Abstract
We invented novel ultra-lightweight and high-resolution MEMS (Micro Electro Mechanical Systems) X-ray optics for space X-ray telescopes. As a first step of R&D, we conducted optical image analysis of a spherically-shaped test optic with a radius of curvature of 1000 mm. Focusing of the parallel light was verified with our optic for the first time.
Keywords
X-ray optics; micro-optics; optical focusing; optical images; optical testing; high-resolution MEMS X-ray optics; microelectromechanical systems; optical image analysis; parallel light focusing; ultra-lightweight MEMS X-ray optics; Focusing; Image analysis; Micromechanical devices; Mirrors; Optical imaging; Optical refraction; Optical variables control; Silicon; Testing; X-ray imaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location
Clearwater, FL
Print_ISBN
978-1-4244-2382-8
Electronic_ISBN
978-1-4244-2382-8
Type
conf
DOI
10.1109/OMEMS.2009.5338574
Filename
5338574
Link To Document