Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

Author

Inokuchi, M. ; Ando, H. ; Kinosita, M. ; Akase, K. ; Higurashi, Eiji ; Sawada, R.

Author_Institution

Dept. of Intell. Machinery & Syst., Kyushu Univ., Fukuoka, Japan

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

119

Lastpage

120

Abstract

We have developed an ultra-micro displacement sensor (Size:1.3 mmtimes1.3 mmtimes1.3 mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

Keywords

displacement measurement; integrated optics; measurement by laser beam; micro-optomechanical devices; microsensors; photodiodes; surface emitting lasers; VCSEL; external mirror shape; monolithic-integrated two-dimensionally distributed photodiodes; sensor size; size 1.3 mm; ultramicrodisplacement sensor; vertical cavity surface emitting laser; Displacement measurement; Equations; Intelligent sensors; Mirrors; Motion measurement; Photodiodes; Position measurement; Semiconductor device measurement; Shape measurement; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338576

Filename

5338576