Title :
Micromachined reflective X-ray concentrator for microanalysis
Author :
Ezoe, Yuichiro ; Mitsuishi, Ikuyuki ; Takagi, Utako ; Mitsuda, Kazuhisa
Author_Institution :
Tokyo Metropolitan Univ., Tokyo, Japan
Abstract :
We propose novel micromachined reflective X-ray concentrators for microanalysis, which have a large design flexibility and can be low cost. Ray-tracing simulations are conducted to estimate the performance.
Keywords :
X-ray applications; micromechanical devices; ray tracing; micromachined concentrator; ray-tracing simulations; reflective X-ray concentrator; Costs; Electron emission; Fluorescence; Mirrors; Optical reflection; Optical scattering; Ray tracing; Scanning electron microscopy; Spectroscopy; Stimulated emission;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338577
