Fast response controller for high acceleration motion stages

With the industry development, high acceleration motion stages are widely used in many fields due to their merits of short manufacturing period. However, the inertia always slows down the systems response, which degrades the system performance drastically. In order to make full use of the high acceleration motion stages, it is necessary to design controllers to deal with the inertia influence. In this paper, effort is mainly devoted to fastening the system response by designing controllers, and three ones including iterative learning variable structure controller, soft variable structure controller and P+A-ILC are proposed. All of the controllers can fasten the system response, and moreover they guarantee the high acceleration motion stages positioning precisely. Experiment results on an X-Y motion stage verify the proposed algorithms.