Title :
Insulator charging simulation
Author :
Vicario, E. ; Rosenberg, N. ; Renoud, R.
Author_Institution :
Dept. de Phys. des Mater., Univ. Claude Bernard, Villeurbanne, France
Abstract :
The problem of the charge distribution within an insulator bombarded by a narrow electron beam is studied using the Monte Carlo technique. In contrast to the conductor or semiconductor case, the electron-insulator interaction is shown to depend closely on the specimen environment; has been taken into account; this assumption is valuable if the specimen is sufficiently large and thick, and if the working distance is not too short. The working distance acts on the spreading of the incident beam via the surface potential
Keywords :
Monte Carlo methods; electron beam effects; insulating materials; insulation; surface potential; Monte Carlo technique; SiO2; charge distribution; charging simulation; electron-insulator interaction; insulator; narrow electron beam; specimen environment; surface potential; Analytical models; Calculus; Dielectrics and electrical insulation; Electric potential; Electron beams; Electron traps; Scanning electron microscopy; Scattering; Surface fitting; Voltage;
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1993. Annual Report., Conference on
Conference_Location :
Pocono Manor, PA
Print_ISBN :
0-7803-0966-9
DOI :
10.1109/CEIDP.1993.378971
