DocumentCode :
2476254
Title :
Light scattering by silicon wafer defects analysis based on discrete sources method
Author :
Eremin, Yu.A. ; Orloy, N.V.
Author_Institution :
Moscow Lomonosov State University
fYear :
1996
fDate :
1996
Keywords :
Computer aided manufacturing; Inspection; Light scattering; Mathematics; Particle scattering; Semiconductor device manufacture; Silicon; Substrates; Surface contamination; Surface morphology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applied Electromagnetism, 1996. Trans Black Sea Region Symposium on
Conference_Location :
Hellas, Greece
Print_ISBN :
0-7803-3763-8
Type :
conf
DOI :
10.1109/AEM.1996.872897
Filename :
872897
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2476254
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