Title :
Reliability-based characterization of single crystalline silicon micromirrors for space applications
Author :
Yoo, Byung-Wook ; Park, Jae-Hyoung ; Jin, Joo-Young ; Park, I.H. ; Kim, Yong-Kweon
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea
Abstract :
We focus on reliability-based tests of one-axis single crystalline silicon micromirrors and performance in space environments. Reliability testing inhere shows how to deal with fabrication misalignment, charging effect, settling time reduction, shock and vibration in space, stiction in humidity, and reflectivity degradation related to outgassing. The micromirror in the international space station (ISS) actuated successfully under non-gravity condition as on earth.
Keywords :
aerospace instrumentation; micromirrors; reflectivity; reliability; silicon; stiction; vibrations; zero gravity experiments; charging effect; fabrication misalignment; humidity; international space station; nongravity condition; one-axis single crystalline silicon micromirrors; reflectivity degradation; reliability-based characterization; settling time reduction; space applications; stiction; vibration; Crystallization; Degradation; Electric shock; Fabrication; Humidity; Micromirrors; Reflectivity; Silicon; Space charge; Testing; international space station; reliability testing; silicon micromirror; space environments;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338593
