Title :
High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability
Author :
Jia, K. ; Pal, S. ; Xie, H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.
Keywords :
actuators; micromirrors; optical arrays; optical design techniques; optical fabrication; surface mount technology; bimorph actuators; fill-factor; hidden actuators; surface mounting; tip-tilt-piston micromirror array; Actuators; Bonding; Electrothermal effects; Fabrication; Micromechanical devices; Micromirrors; Mirrors; Optical films; Silicon; Voltage;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338594
