P1D-2 High Temperature Langasite BAW Gas Sensor Based on ZnO Nanowire Arrays

In this paper, we present our recent study on the fabrication and characterization of the ZnO nanowires gas sensor using thickness shear mode (TSM) langasite resonators. C-axis vertically aligned ZnO nanowire arrays were synthesized on the langasite resonator by using an utrathin ZnO seed layer through a simple hydrothermal route. The nanowires were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). N02 as the target gas was particularly used to investigate the sensing performance of langasite resonator sensors with nanostructured ZnO interfacial layer at high temperature conditions. The results indicated the use of the ZnO nanowire arrays on acoustic wave resonator can greatly enhance the sensitivity and sensor response speed due to the fast surface/interface reaction and surface roughness.