Title :
P1D-4 Characteristics of a Novel Magnetic Field Sensor Using Piezoelectric Vibrations
Author :
Dan, Keita ; Nakamura, Kentaro ; Ueha, Sadayuki
Author_Institution :
Tokyo Inst. of Technol., Yokohama
Abstract :
This report presents novel configurations for magnetic field sensor using piezoelectric vibrations, which are based on the simple electromagnetic physics and require no semiconductor materials. First, we present the principle and basic characteristics of the proposed sensor with a piezoelectric bending vibrator. Second, the sensor is applied to a scanning probe of a permeability microscope for surface mapping.
Keywords :
bending; magnetic field measurement; magnetic sensors; piezoelectric devices; plates (structures); scanning probe microscopy; surface phenomena; vibrations; electromagnetic physics; magnetic field sensor characteristics; piezoelectric bending vibrator; piezoelectric vibration; scanning probe permeability microscope; surface mapping; Electrodes; Intelligent sensors; Magnetic field measurement; Magnetic sensors; Microscopy; Permeability; Semiconductor materials; Sensor phenomena and characterization; Vibration measurement; Voltage;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.343
