Title :
Properties of Thin Film and Silicon Solid State Components - Their Effects on Microcircuit Performance
Author :
Ekiss, J.A. ; Roschen, J. ; Thomas, P.G.
Keywords :
Capacitors; Equivalent circuits; Fabrication; Resistors; Semiconductor thin films; Silicon; Solid state circuits; Sputtering; Substrates; Thin film circuits;
Conference_Titel :
1962 IRE National Convention
DOI :
10.1109/IRENC.1962.199251
