Title :
MEMS tunable Michelson interferometer with robust beam splitting architecture
Author :
Saadany, B. ; Omran, H. ; Medhat, M. ; Marty, F. ; Khalil, D. ; Bourouina, T.
Author_Institution :
MEMS Div., Si-Ware Syst., Cairo, Egypt
Abstract :
A new beam splitter is proposed to realize a completely integrated Michelson interferometer, where a single medium interface (Si/Air) is used for optical beam splitting. This offers a stable splitting ratio over a very wide spectral range. Using this technique on SOI wafers, with a moving mirror, a highly robust and tunable interferometer is fabricated. The tunable interferometer is tested experimentally by measuring optical interference versus mirror displacement.
Keywords :
Michelson interferometers; micro-optomechanical devices; micromirrors; optical beam splitters; MEMS; Michelson interferometer; SOI wafers; beam splitter; mirror displacement; moving mirror; optical interference; robust beam splitting architecture; single medium interface; Interference; Micromechanical devices; Mirrors; Optical beam splitting; Optical fiber couplers; Optical interferometry; Optical sensors; Robustness; Tunable circuits and devices; Wavelength measurement; Bragg Mirrors; DRIE; Michelson Interferometer; SOI; Spectrometer;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338601
