MEMS tunable Michelson interferometer with robust beam splitting architecture

Author

Saadany, B. ; Omran, H. ; Medhat, M. ; Marty, F. ; Khalil, D. ; Bourouina, T.

Author_Institution

MEMS Div., Si-Ware Syst., Cairo, Egypt

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

49

Lastpage

50

Abstract

A new beam splitter is proposed to realize a completely integrated Michelson interferometer, where a single medium interface (Si/Air) is used for optical beam splitting. This offers a stable splitting ratio over a very wide spectral range. Using this technique on SOI wafers, with a moving mirror, a highly robust and tunable interferometer is fabricated. The tunable interferometer is tested experimentally by measuring optical interference versus mirror displacement.

Keywords

Michelson interferometers; micro-optomechanical devices; micromirrors; optical beam splitters; MEMS; Michelson interferometer; SOI wafers; beam splitter; mirror displacement; moving mirror; optical interference; robust beam splitting architecture; single medium interface; Interference; Micromechanical devices; Mirrors; Optical beam splitting; Optical fiber couplers; Optical interferometry; Optical sensors; Robustness; Tunable circuits and devices; Wavelength measurement; Bragg Mirrors; DRIE; Michelson Interferometer; SOI; Spectrometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338601

Filename

5338601