Title :
2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering
Author :
Gokce, Sertan Kutal ; Holmstrom, Sven ; Hibert, Cyrille ; Ataman, Caglar ; Arslan, Aslihan ; Seren, Huseyin R. ; Urey, Hakan
Author_Institution :
Dept. of Electr. Eng., Koc Univ., Istanbul, Turkey
Abstract :
A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1 mm square microlens-array it deflects 40 um in-plane at 60 V and 95 um out-of-plane at 100 V.
Keywords :
beam steering; micro-optomechanical devices; microlenses; optical arrays; 2-axis motion; 2D scanning MEMS stage; comb fingers; high-resolution beam steering; microlens arrays; size 1.1 mm; voltage 60 V; Beam steering; Lenses; Micromechanical devices; Microoptics; Hybrid integration; beam steering; comb drive;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338606
