• DocumentCode
    2476541
  • Title

    2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering

  • Author

    Gokce, Sertan Kutal ; Holmstrom, Sven ; Hibert, Cyrille ; Ataman, Caglar ; Arslan, Aslihan ; Seren, Huseyin R. ; Urey, Hakan

  • Author_Institution
    Dept. of Electr. Eng., Koc Univ., Istanbul, Turkey
  • fYear
    2009
  • fDate
    17-20 Aug. 2009
  • Firstpage
    43
  • Lastpage
    44
  • Abstract
    A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1 mm square microlens-array it deflects 40 um in-plane at 60 V and 95 um out-of-plane at 100 V.
  • Keywords
    beam steering; micro-optomechanical devices; microlenses; optical arrays; 2-axis motion; 2D scanning MEMS stage; comb fingers; high-resolution beam steering; microlens arrays; size 1.1 mm; voltage 60 V; Beam steering; Lenses; Micromechanical devices; Microoptics; Hybrid integration; beam steering; comb drive;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
  • Conference_Location
    Clearwater, FL
  • Print_ISBN
    978-1-4244-2382-8
  • Electronic_ISBN
    978-1-4244-2382-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2009.5338606
  • Filename
    5338606
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2476541