Title :
Electrically separated two-axis MEMS mirror array module for wavelength selective switches
Author :
Usui, Mitsuo ; Uchiyama, Shingo ; Hashimoto, Etsu ; Hadama, Koichi ; Ishii, Yuzo ; Matsuura, Nobuaki ; Sakata, Tomomi ; Shimoyama, Nobuhiro ; Sato, Yasuhiro ; Ishii, Hiromu ; Matsuura, Tohru ; Shimokawa, Fusao ; Uenishi, Yuji
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
A novel two-axis MEMS mirror array module for wavelength selective switches feature a new electrode structure that reduces electrical interference between adjacent channels. The fabricated 50-channel mirror module has good characteristics satisfying system requirements.
Keywords :
micro-optomechanical devices; micromirrors; optical arrays; optical fabrication; optical switches; electrical interference; electrically separated two-axis MEMS mirror array; electrode structure; wavelength selective switches; Micromechanical devices; Mirrors; XML; Electrical interference; MEMS; Mirror array; Packaging technology; Wavelength selective switches (WSSs);
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338611
