Title :
All optically driven MEMS deformable mirrors via direct cascading with wafer bonded GaAs/GaP PIN photodetectors
Author :
Mathur, Vaibhav ; Vangala, Shivashankar R. ; Qian, Xifeng ; Goodhue, William D. ; Haji-Saeed, Bahareh ; Khoury, Jed
Author_Institution :
Dept. of Phys. & Appl. Phys., Univ. of Massachusetts, Lowell, MA, USA
Abstract :
Significant progress has been made to realize optically controlled phase correction micro-mirror arrays. The devices consist of silicon nitride spring plate mirrors optically actuated by integrated GaAs P-I-N photodetectors wafer bonded on a GaP platform.
Keywords :
micro-optomechanical devices; micromirrors; optical arrays; optical control; optical fabrication; p-i-n photodiodes; photodetectors; silicon compounds; wafer bonding; GaAs-GaP; MEMS; PIN photodetectors; SiN; deformable mirrors; micromirror arrays; optical actuator; optical control; phase correction; spring plate mirrors; wafer bonding; Gallium arsenide; Micromechanical devices; Mirrors; Optical arrays; Optical control; Phased arrays; Photodetectors; Silicon; Springs; Wafer bonding;
Conference_Titel :
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location :
Clearwater, FL
Print_ISBN :
978-1-4244-2382-8
Electronic_ISBN :
978-1-4244-2382-8
DOI :
10.1109/OMEMS.2009.5338614
