• DocumentCode
    2476729
  • Title

    Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy

  • Author

    Kuiper, Stefan ; Van den Hof, Paul ; Schitter, Georg

  • Author_Institution
    Delft Center for Syst. & Control, Delft Univ. of Technol., Delft, Netherlands
  • fYear
    2012
  • fDate
    13-16 May 2012
  • Firstpage
    888
  • Lastpage
    893
  • Abstract
    In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.
  • Keywords
    atomic force microscopy; feedback; force measurement; hysteresis; piezoelectric actuators; AFM imaging; atomic force microscopy; control bandwidth; control system; dynamical uncertainty; feedback loop; force measurement; hysteresis; imaging system; piezoelectric actuators; sample topography; topography estimation; Accuracy; Actuators; Bandwidth; Estimation error; Hysteresis; Surfaces; Uncertainty;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
  • Conference_Location
    Graz
  • ISSN
    1091-5281
  • Print_ISBN
    978-1-4577-1773-4
  • Type

    conf

  • DOI
    10.1109/I2MTC.2012.6229192
  • Filename
    6229192