DocumentCode :
2476729
Title :
Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy
Author :
Kuiper, Stefan ; Van den Hof, Paul ; Schitter, Georg
Author_Institution :
Delft Center for Syst. & Control, Delft Univ. of Technol., Delft, Netherlands
fYear :
2012
fDate :
13-16 May 2012
Firstpage :
888
Lastpage :
893
Abstract :
In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.
Keywords :
atomic force microscopy; feedback; force measurement; hysteresis; piezoelectric actuators; AFM imaging; atomic force microscopy; control bandwidth; control system; dynamical uncertainty; feedback loop; force measurement; hysteresis; imaging system; piezoelectric actuators; sample topography; topography estimation; Accuracy; Actuators; Bandwidth; Estimation error; Hysteresis; Surfaces; Uncertainty;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
Conference_Location :
Graz
ISSN :
1091-5281
Print_ISBN :
978-1-4577-1773-4
Type :
conf
DOI :
10.1109/I2MTC.2012.6229192
Filename :
6229192
Link To Document :
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