DocumentCode
2476767
Title
Demonstration of a monolithic dielectric microstructured surface with a reflectivity of 99.8%
Author
Brückner, Frank ; Clausnitzer, Tina ; Käsebier, Thomas ; Kley, Ernst-Bernhard ; Tünnermann, Andreas
Author_Institution
Inst. fur Angewandte Phys., Friedrich-Schiller-Univ. Jena, Jena, Germany
fYear
2009
fDate
17-20 Aug. 2009
Firstpage
146
Lastpage
147
Abstract
We present first experimental data on a highly reflective monolithic dielectric microstructured surface that has been proposed recently to open a route to monolithic (micro-) opto-mechanical systems such as high precision interferometric experiments.
Keywords
micro-optomechanical devices; micromirrors; reflectivity; interferometry; microstructured surface; monolithic micro-opto-mechanical systems; reflectivity; Dielectrics; Gratings; Optical interferometry; Optical materials; Optical noise; Optical sensors; Optical surface waves; Optical waveguides; Reflectivity; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Conference_Location
Clearwater, FL
Print_ISBN
978-1-4244-2382-8
Electronic_ISBN
978-1-4244-2382-8
Type
conf
DOI
10.1109/OMEMS.2009.5338617
Filename
5338617
Link To Document