Title :
P1I-4 Simulation of BAW Resonators Frequency Adjustment
Author :
Reinhard, A. ; Buffet, N. ; Shirakawa, Akira
Author_Institution :
CEA-Leti Minatec, Grenoble
Abstract :
A theoretical approach of the frequency trimming of BAW filters is presented. We discuss the way to integrate this step already in the design stage by considering the frequency adjustment of worst cases. In particular, we show that the frequency trimming puts some requirements on the acoustical design of resonators. We also discuss the limits of this adjustment, and evaluate on an example the minimum dispersion that cannot be suppressed.
Keywords :
acoustic resonator filters; bulk acoustic wave devices; BAW filters; BAW resonator; acoustical design; frequency adjustment simulation; frequency trimming; Bulk acoustic wave devices; Electrodes; Etching; Fabrication; Reproducibility of results; Research and development; Resonance; Resonant frequency; Resonator filters; Shape;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.363
