Large MEMS-based programmable slit mask for multi-object spectroscopy

Author

Canonica, Michael ; Waldis, Severin ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Noell, Wilfried ; De Rooij, Nico

Author_Institution

Ecole Polytech. Fed. de Lausanne, Neuchatel, Switzerland

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

27

Lastpage

28

Abstract

Next-generation infrared astronomical instrumentation for telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. A large micromirror array of 20´000 micromirrors has been fabricated for cryogenic environment utilizing a dedicated assembly stage. Preliminary tests demonstrate the functionality of both the assembly system and the device.

Keywords

astronomical telescopes; cryogenics; masks; micro-optomechanical devices; micromirrors; optical arrays; optical fabrication; cryogenic environment; dedicated assembly stage; large MEMS-based programmable slit mask; micromirror array; multiobject spectroscopy; next-generation infrared astronomical instrumentation; telescopes; Assembly; Bonding; Cryogenics; Electrodes; Infrared spectra; Micromechanical devices; Micromirrors; Mirrors; Spectroscopy; Telescopes; MEMS; MOEMS; cryogenic; large array; micromirror; mirror; multi-object spectrograph; programmable slit mask;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338621

Filename

5338621