Magnetic actuation type low cost polymer MEMS mirror fabricated by photolithography and wet etching processes

Author

Nakano, Tetsuro ; Suzuki, Takaaki ; Oohira, Fumikazu ; Hashiguchi, Gen

Author_Institution

Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Takamatsu, Japan

fYear

2009

fDate

17-20 Aug. 2009

Firstpage

9

Lastpage

10

Abstract

This paper reports the lower cost mirror device composed of the inexpensive glass and the polymer material. This device is a new construction composed of the glass as the substrate and the polymer as the torsion bar. The polymer mirror containing the magnetic particles is used. The device can be fabricated only by the photolithography and wet etching processes. We adopted the actuation system which attracts the mirror directly with the electromagnet. We fabricated the large-sized mirror (20 mm times 10 mm) device of one axis deflection, and evaluated the characteristics of the fabricated mirror device. The optical deflection angle of the fabricated device is plusmn20 deg. As the result, we confirmed the possibility to realize the magnetic actuation type low cost polymer MEMS mirror.

Keywords

electromagnetic actuators; etching; iron compounds; magnetic particles; micro-optomechanical devices; microfabrication; micromirrors; optical fabrication; optical glass; optical polymers; photolithography; FeO; SiO₂; electromagnet; magnetic actuation; magnetic particles; optical deflection angle; photolithography; polymer MEMS mirror; wet etching; Costs; Glass; Lithography; Magnetic materials; Magnetic particles; Micromechanical devices; Mirrors; Optical devices; Polymers; Wet etching; Low Cost; MEMS Mirror; Magnetic Actuation; Photolithography; Polymer; SU-8;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Conference_Location

Clearwater, FL

Print_ISBN

978-1-4244-2382-8

Electronic_ISBN

978-1-4244-2382-8

Type

conf

DOI

10.1109/OMEMS.2009.5338632

Filename

5338632