Title :
Monitoring on dry vacuum pump characteristics by mobile device
Author :
Hsieh, Fan-Chun ; Chou, Shih-Chieh ; Lin, Ping-Hung ; Chang, Shian-Wen ; Chen, Fong-Zhi ; Liao, Tai-Shan ; Liu, Da-Ren ; Chiang, Donyau
Author_Institution :
Instrum. Technol. Res. Center, Hsinchu, Taiwan
Abstract :
Dry vacuum pump is a core device in semiconductor and electro-optic industries for vacuum purpose. The pumping characteristics of dry vacuum pump could affect significantly the performance of secondary pump. This article present a method which integrates a mobile device through the remote application program to measure the vacuum pressure, sound, vibration, and power for a dry vacuum pump system. Moreover, the LabVIEW was implemented to the system for pumping experiment control. The pumping characteristics monitored by mobile device can be useful for processing monitor.
Keywords :
acoustic variables measurement; condition monitoring; mobile handsets; power measurement; pressure measurement; vacuum pumps; vibration measurement; virtual instrumentation; LabVIEW; core device; dry vacuum pump characteristic monitoring; electro-optic industries; mobile device; power measurement; remote application program; secondary pump; semiconductor industries; sound measurement; vacuum pressure measurement; vibration measurement; Androids; Instruments; Mobile handsets; Monitoring; Vacuum systems; Wireless communication; Wireless sensor networks; dry pump; mobile device; pumping characteristics;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2012 IEEE International
Conference_Location :
Graz
Print_ISBN :
978-1-4577-1773-4
DOI :
10.1109/I2MTC.2012.6229217
