Title :
P2G-5 Area and Dispersion Dependence of Vibration Shape and Coupling Coefficient in Thin Film BAW Resonators
Author :
Pensala, Tuomas ; Ylilammi, Markku ; Meltaus, Johanna ; Kokkonen, Kimmo
Author_Institution :
VTT Tech. Res. Centre of Finland Espoo, Espoo
Abstract :
Size dependence of resonator performance is studied in AlN and ZnO resonators with FEM simulation, electrical measurements, and laser interferometry. Eigenmode spectrum compression due to increased size of the resonator leads to smoothening of the electrical response and flattening of the vibrational at-resonance response as several modes can be simultaneously excited near the device resonance frequency. This is seen both in simulations and in measurements.
Keywords :
aluminium compounds; bulk acoustic wave devices; interferometry; thin films; zinc compounds; AlN; FEM simulation; ZnO; coupling coefficient; eigenmode spectrum compression; laser interferometry; resonator performance; thin film BAW resonators; vibration shape; Electric variables measurement; Interferometry; Laser excitation; Laser modes; Resonance; Resonant frequency; Shape; Size measurement; Transistors; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.418
