DocumentCode
2478950
Title
Nonlinear dynamic modeling of micromachined microwave switches
Author
Chan, E.K. ; Kan, E.C. ; Dutton, R.W. ; Pinsky, P.M.
Author_Institution
Center for Integrated Syst., Stanford Univ., CA, USA
Volume
3
fYear
1997
fDate
8-13 June 1997
Firstpage
1511
Abstract
Nonlinear dynamic lumped models of micromachined microwave switches have been formulated and successfully applied to analyses of transient characteristics and geometrical scaling. Parameter extraction through electrical measurements is summarized. The results are compared to transient quasi-2D simulations.
Keywords
micromachining; microwave devices; nonlinear dynamical systems; switches; electrical measurement; geometrical scaling; micromachined microwave switch; nonlinear dynamic lumped model; parameter extraction; quasi-2D simulation; transient analysis; Damping; Deformable models; Electrostatics; Parameter extraction; Residual stresses; Solid modeling; Springs; Switches; Switching circuits; Transient analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location
Denver, CO, USA
ISSN
0149-645X
Print_ISBN
0-7803-3814-6
Type
conf
DOI
10.1109/MWSYM.1997.596617
Filename
596617
Link To Document