Title :
P3I-5 Study on SAW Characteristics of Amorphous- TeO2/128°Y-X LiNbO3 Structures
Author :
Shang, Xiaoli ; Gong, Xun ; Xiong, Jun ; Tong, Tangji ; Zhang, De
Author_Institution :
Nanjing Univ., Nanjing
Abstract :
Theoretical calculations have been performed for the temperature stability of the amorphous TeO2/128degY-X LiNbO3 structure. The phase velocity, electromechanical coupling coefficient and temperature coefficient of delay (TCD) have been calculated. Amorphous TeO2 film has been found as an attractive negative TCD over-layer that can yield a zero TCD when combined with a positive TCD material such as 128 deg Y-X LiNb03. And in comparison to conventional SiO2 over-layer, the amorphous TeO2´s film reaches the zero TCD under a much less thickness. The effect of the temperature coefficients of amorphous TeO2´s elastic constants on the structure´s TCD has also been studied. We find the temperature coefficients of amorphous TeO2 Cn have a more dominant effect on TCD.
Keywords :
elastic constants; noncrystalline structure; piezoelectricity; surface acoustic waves; thermal stability; LiNbO3; TeO2; amorphous film; elastic constants; electromechanical coupling coefficient; phase velocity; surface acoustic waves; temperature coefficient of delay; temperature stability; Amorphous materials; Delay; Dielectric materials; Filtering theory; Laboratories; Stability; Substrates; Surface acoustic waves; Temperature sensors; Thermal expansion;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.476
