Design of an electronic oscillator for biosensing applications based on a MEMS resonator

Author

Russino, Vincenzo ; Pieri, Francesco ; Bruschi, Paolo

Author_Institution

Dipt. di Ing. dell´´Inf.: Elettron., Inf., Telecomun., Univ. di Pisa, Pisa, Italy

fYear

2011

fDate

3-7 July 2011

Firstpage

53

Lastpage

56

Abstract

Resonant mass sensors (i.e. microbalances) are commonly used in chemical and biochemical sensing, and their MEMS counterparts, based on MEMS resonators, are actively investigated. In this work, we present the design of an integrated electronic oscillator, based on general purpose CMOS operational amplifiers (op-amps) and conceived to operate with a magnetically actuated MEMS resonator fabricated on the same chip as the op-amps. After a description of the resonator and op-amp structure and characteristics, a two-stage, positive feedback oscillator topology is presented. The simulated behavior of the oscillator is presented and discussed, and the temperature stability of the oscillator output frequency is analyzed.

Keywords

CMOS analogue integrated circuits; biosensors; electromagnetic actuators; feedback oscillators; microactuators; microfabrication; micromechanical resonators; microsensors; operational amplifiers; CMOS operational amplifiers; biosensing applications; integrated electronic oscillator design; magnetically actuated MEMS resonator; op-amp structure; oscillator output frequency analysis; positive feedback oscillator topology; resonant mass sensors; temperature stability; CMOS integrated circuits; Integrated circuit modeling; Magnetic resonance; Micromechanical devices; Oscillators; Sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Ph.D. Research in Microelectronics and Electronics (PRIME), 2011 7th Conference on

Conference_Location

Trento

Print_ISBN

978-1-4244-9138-4

Electronic_ISBN

978-1-4244-9136-0

Type

conf

DOI

10.1109/PRIME.2011.5966215

Filename

5966215