P4M-2 A Linear CMUT Air-Coupled Array For NDE Based on MUMPS

Author

Octavio, A. ; Martín, C.J. ; Martínez, O. ; Hernando, J. ; Gómez-Ullate, L. ; De Espinosa, F. Montero

Author_Institution

CSIC, Madrid

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

2127

Lastpage

2130

Abstract

In this paper, the design and characterization of a linear cMUT array based on MUMPS technology is presented. The array has 33 elements having each element 68times2 cMUT cells electrically connected in parallel. The single cell consists of a 130 mum square shaped polysilicon membrane, a gold top electrode, silicon nitride as the isolation layer between conductors and heavily doped silicon which works as the bottom electrode. The central frequency is 720 kHz. Electrical and optical measurements were performed and compared with FEM calculations. These results were used to study the mechanical and electrical behaviour of the device.

Keywords

finite element analysis; micromachining; micromechanical devices; nondestructive testing; silicon compounds; ultrasonic transducer arrays; FEM calculation; MUMPS; NDE; frequency 720 kHz; gold top electrode; isolation layer; linear CMUT air-coupled array; polysilicon membrane; silicon nitride; size 130 mum; Biomedical optical imaging; Biomembranes; Electric variables measurement; Electrodes; Fabrication; Micromechanical devices; Performance evaluation; Silicon; Ultrasonic transducer arrays; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2007. IEEE

Conference_Location

New York, NY

ISSN

1051-0117

Print_ISBN

978-1-4244-1384-3

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2007.535

Filename

4410108